Issued Patents 2018
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10073354 | Exposure method of wafer substrate, manufacturing method of semiconductor device, and exposure tool | Yung-Cheng Chen, Fei-Gwo Tsai, Chi-Hung Liao, Shih-Chi Fu, Wei-Ti Hsu +4 more | 2018-09-11 |
| 9908201 | Systems and methods for edge bead removal | Chun-Hao Chang, Shang-Yun HUANG, Jui-Ping Chuang, Li-Kong Turn, Fei-Gwo Tsai | 2018-03-06 |