Issued Patents 2018
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10101662 | Developing method | Yi-Rem Chen, Ming-Shane Lu, Chung-Hao Chang, Li-Kong Turn, Fei-Gwo Tsai | 2018-10-16 |
| 10073354 | Exposure method of wafer substrate, manufacturing method of semiconductor device, and exposure tool | Hsueh-Yi Chung, Yung-Cheng Chen, Fei-Gwo Tsai, Chi-Hung Liao, Shih-Chi Fu +4 more | 2018-09-11 |
| 10014394 | Structure and formation method of semiconductor device with metal gate | Che-Cheng Chang, Chen-Hsiang Lu, Yu-Cheng Liu, Wei-Ting Chen | 2018-07-03 |
| 9908201 | Systems and methods for edge bead removal | Chun-Hao Chang, Hsueh-Yi Chung, Shang-Yun HUANG, Li-Kong Turn, Fei-Gwo Tsai | 2018-03-06 |
| 9899271 | Structure and formation method of semiconductor device structure | Che-Cheng Chang, Chen-Hsiang Lu, Wei-Ting Chen, Yu-Cheng Liu | 2018-02-20 |