Issued Patents 2018
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10101662 | Developing method | Yi-Rem Chen, Ming-Shane Lu, Chung-Hao Chang, Jui-Ping Chuang, Li-Kong Turn | 2018-10-16 |
| 10073354 | Exposure method of wafer substrate, manufacturing method of semiconductor device, and exposure tool | Hsueh-Yi Chung, Yung-Cheng Chen, Chi-Hung Liao, Shih-Chi Fu, Wei-Ti Hsu +4 more | 2018-09-11 |
| 9908201 | Systems and methods for edge bead removal | Chun-Hao Chang, Hsueh-Yi Chung, Shang-Yun HUANG, Jui-Ping Chuang, Li-Kong Turn | 2018-03-06 |