Issued Patents 2018
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10161965 | Method of test probe alignment control | Jui-Long Chen, Chien-Chih Liao, Chin-Hsiang Lin, Hui-Yun Chao, Tseng Chin Lo +1 more | 2018-12-25 |
| 10113233 | Multi-zone temperature control for semiconductor wafer | Chun-Lin Chang, Hsin-Hsien Wu, Zin-Chang Wei, Chi-Ming Yang, Chyi Shyuan Chern +4 more | 2018-10-30 |
| 10096482 | Apparatus and method for chemical mechanical polishing process control | Keung Hui, Jin-Ning Sung, Soon-Kang Huang, Yen-Di Tsen | 2018-10-09 |
| 10047439 | Method and system for tool condition monitoring based on a simulated inline measurement | Po-Feng Tsai, Chia-Tong Ho, Sunny Wu, Jo Fei Wang, Chin-Hsiang Lin | 2018-08-14 |
| 9997420 | Method and/or system for chemical mechanical planarization (CMP) | Yen-Di Tsen, Cheng Yen-Wei | 2018-06-12 |
| 9870896 | System and method for controlling ion implanter | Po-Feng Tsai, Chia-Tong Ho, Chia-Hsing Liao, Sheng-Wei Lee, Jo Fei Wang | 2018-01-16 |