Issued Patents 2018
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10113233 | Multi-zone temperature control for semiconductor wafer | Chun-Lin Chang, Hsin-Hsien Wu, Zin-Chang Wei, Chi-Ming Yang, Chyi Shyuan Chern +4 more | 2018-10-30 |
| 10047439 | Method and system for tool condition monitoring based on a simulated inline measurement | Po-Feng Tsai, Chia-Tong Ho, Sunny Wu, Jong-I Mou, Chin-Hsiang Lin | 2018-08-14 |
| 9870896 | System and method for controlling ion implanter | Po-Feng Tsai, Chia-Tong Ho, Chia-Hsing Liao, Sheng-Wei Lee, Jong-I Mou | 2018-01-16 |