Issued Patents 2018
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10121637 | Multi-platen ion implanter and method for implanting multiple substrates simultaneously | Shao-Hua Wang, Ming-Te Chen | 2018-11-06 |
| 9870896 | System and method for controlling ion implanter | Po-Feng Tsai, Chia-Tong Ho, Chia-Hsing Liao, Jo Fei Wang, Jong-I Mou | 2018-01-16 |