Issued Patents 2018
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10121637 | Multi-platen ion implanter and method for implanting multiple substrates simultaneously | Shao-Hua Wang, Sheng-Wei Lee | 2018-11-06 |
| 9982338 | High-throughput system and method for post-implantation single wafer warm-up | Tsun-Jen Chan, Cheng-Hung Hu, Yi-Hann Chen, Kang Hua Chang | 2018-05-29 |