Issued Patents 2018
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10047439 | Method and system for tool condition monitoring based on a simulated inline measurement | Chia-Tong Ho, Sunny Wu, Jo Fei Wang, Jong-I Mou, Chin-Hsiang Lin | 2018-08-14 |
| 9870896 | System and method for controlling ion implanter | Chia-Tong Ho, Chia-Hsing Liao, Sheng-Wei Lee, Jo Fei Wang, Jong-I Mou | 2018-01-16 |