Issued Patents 2018
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10156012 | Cleaning method, method of manufacturing semiconductor device, substrate processing apparatus, and a non-transitory computer-readable recording medium | Kenji Kameda, Akiou Kikuchi, Yuta Takeda, Kunihiro Yamauchi | 2018-12-18 |
| 10096463 | Method of manufacturing semiconductor device, substrate processing apparatus comprising exhaust port and multiple nozzles, and recording medium | Yoshitomo HASHIMOTO, Tatsuru Matsuoka, Ryota Horiike, Shintaro Kogura | 2018-10-09 |
| 9976214 | Cleaning method and method of manufacturing semiconductor device | Koei KURIBAYASHI, Kenji Kameda | 2018-05-22 |