Issued Patents 2018
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9982347 | Cleaning method, method of manufacturing semiconductor device and substrate processing apparatus | Takatomo Yamaguchi, Takafumi Sasaki | 2018-05-29 |
| 9976214 | Cleaning method and method of manufacturing semiconductor device | Masaya NAGATO, Kenji Kameda | 2018-05-22 |