Issued Patents 2018
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| D826185 | Ceiling heater for substrate processing apparatus | Tetsuya Kosugi, Shuhei Saido | 2018-08-21 |
| D825501 | Air flow controller for heater of substrate processing apparatus | Tetsuya Kosugi, Shuhei Saido | 2018-08-14 |
| D825502 | Heater for substrate processing apparatus | Tetsuya Kosugi, Shuhei Saido | 2018-08-14 |
| D822081 | Rotary tool for boat of semiconductor manufacturing apparatus | Takashi Nogami | 2018-07-03 |
| 9982347 | Cleaning method, method of manufacturing semiconductor device and substrate processing apparatus | Takafumi Sasaki, Koei KURIBAYASHI | 2018-05-29 |
| D818961 | Insulation unit cover of semiconductor manufacturing apparatus | — | 2018-05-29 |
| D818960 | Insulation unit of semiconductor manufacturing apparatus | — | 2018-05-29 |