Issued Patents 2018
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| D826185 | Ceiling heater for substrate processing apparatus | Takatomo Yamaguchi, Shuhei Saido | 2018-08-21 |
| D825501 | Air flow controller for heater of substrate processing apparatus | Takatomo Yamaguchi, Shuhei Saido | 2018-08-14 |
| D825502 | Heater for substrate processing apparatus | Takatomo Yamaguchi, Shuhei Saido | 2018-08-14 |
| D824440 | Heater of substrate processing apparatus | Motoya Takewaki | 2018-07-31 |
| D823363 | Heater of substrate processing apparatus | Motoya Takewaki | 2018-07-17 |
| D819463 | Protector tube for thermocouple | Tokunobu Akao, Atushi Umekawa, Masaaki Ueno, Hitoshi Murata, Masashi Sugishita +1 more | 2018-06-05 |
| D818850 | Protector tube for thermocouple | Tokunobu Akao, Atushi Umekawa, Masaaki Ueno, Hitoshi Murata, Masashi Sugishita +1 more | 2018-05-29 |