Issued Patents 2018
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| D826185 | Ceiling heater for substrate processing apparatus | Tetsuya Kosugi, Takatomo Yamaguchi | 2018-08-21 |
| D825501 | Air flow controller for heater of substrate processing apparatus | Takatomo Yamaguchi, Tetsuya Kosugi | 2018-08-14 |
| D825502 | Heater for substrate processing apparatus | Tetsuya Kosugi, Takatomo Yamaguchi | 2018-08-14 |
| 9957616 | Substrate processing apparatus and heating unit | Hitoshi Murata, Yuichi Wada, Takashi Yahata, Hidenari Yoshida | 2018-05-01 |
| D813181 | Cover of seal cap for reaction chamber of semiconductor | Yusaku OKAJIMA, Mika Urushihara | 2018-03-20 |