Issued Patents 2018
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| D824440 | Heater of substrate processing apparatus | Tetsuya Kosugi | 2018-07-31 |
| D823363 | Heater of substrate processing apparatus | Tetsuya Kosugi | 2018-07-17 |
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| D824440 | Heater of substrate processing apparatus | Tetsuya Kosugi | 2018-07-31 |
| D823363 | Heater of substrate processing apparatus | Tetsuya Kosugi | 2018-07-17 |