Issued Patents 2018
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10156012 | Cleaning method, method of manufacturing semiconductor device, substrate processing apparatus, and a non-transitory computer-readable recording medium | Masaya NAGATO, Akiou Kikuchi, Yuta Takeda, Kunihiro Yamauchi | 2018-12-18 |
| 10153153 | Method for removing adhering matter and dry etching method | Akiou Kikuchi, Masanori Watari, Shin Hiyama, Yasutoshi TSUBOTA | 2018-12-11 |
| 9976214 | Cleaning method and method of manufacturing semiconductor device | Masaya NAGATO, Koei KURIBAYASHI | 2018-05-22 |
| 9856560 | Method for manufacturing semiconductor device and substrate processing apparatus | Jie Wang, Yuji Urano | 2018-01-02 |