Issued Patents 2018
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10153153 | Method for removing adhering matter and dry etching method | Akiou Kikuchi, Masanori Watari, Kenji Kameda, Yasutoshi TSUBOTA | 2018-12-11 |
| 10121651 | Method of manufacturing semiconductor device | Arito OGAWA | 2018-11-06 |
| 10014171 | Method of manufacturing semiconductor device | Yukinori Aburatani, Tsuyoshi Takeda, Naofumi Ohashi | 2018-07-03 |
| 9911580 | Substrate processing apparatus, method of manufacturing semiconductor device, and baffle structure of the substrate processing apparatus | Hidehiro Yanai, Toru Kakuda, Toshiya Shimada, Tomihiro Amano | 2018-03-06 |