Issued Patents 2018
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9911580 | Substrate processing apparatus, method of manufacturing semiconductor device, and baffle structure of the substrate processing apparatus | Hidehiro Yanai, Shin Hiyama, Toru Kakuda, Toshiya Shimada | 2018-03-06 |