Issued Patents 2018
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10156798 | Substrate processing apparatus | — | 2018-12-18 |
| 10128128 | Method of manufacturing semiconductor device having air gap between wirings for low dielectric constant | Tsuyoshi Takeda, Hiroshi Ashihara, Toshiyuki Kikuchi | 2018-11-13 |
| 10115583 | Method of manufacturing semiconductor device | Satoshi Shimamoto, Hiroshi Ashihara, Kazuyuki Toyoda | 2018-10-30 |
| 10014171 | Method of manufacturing semiconductor device | Yukinori Aburatani, Shin Hiyama, Tsuyoshi Takeda | 2018-07-03 |
| 9991179 | Method of manufacturing semiconductor device | Kazuyuki Toyoda, Satoshi Shimamoto, Toshiyuki Kikuchi | 2018-06-05 |
| 9966261 | Method of manufacturing semiconductor device | Katsuhiko Yamamoto | 2018-05-08 |