Issued Patents 2018
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10128128 | Method of manufacturing semiconductor device having air gap between wirings for low dielectric constant | Tsuyoshi Takeda, Hiroshi Ashihara, Naofumi Ohashi | 2018-11-13 |
| 10090322 | Method of manufacturing semiconductor device | Satoshi Shimamoto, Atsushi Moriya, Masanori NAKAYAMA, Takashi Nakagawa | 2018-10-02 |
| 9991179 | Method of manufacturing semiconductor device | Naofumi Ohashi, Kazuyuki Toyoda, Satoshi Shimamoto | 2018-06-05 |