Issued Patents 2018
Showing 1–12 of 12 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10163910 | Method of manufacturing semiconductor device | Atsushi Moriya | 2018-12-25 |
| 10134586 | Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Takafumi Nitta, Yoshiro Hirose | 2018-11-20 |
| 10115583 | Method of manufacturing semiconductor device | Hiroshi Ashihara, Kazuyuki Toyoda, Naofumi Ohashi | 2018-10-30 |
| 10090322 | Method of manufacturing semiconductor device | Toshiyuki Kikuchi, Atsushi Moriya, Masanori NAKAYAMA, Takashi Nakagawa | 2018-10-02 |
| 10066298 | Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Ryuji Yamamoto, Yoshiro Hirose | 2018-09-04 |
| 10032629 | Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Takafumi Nitta, Yoshiro Hirose | 2018-07-24 |
| 9991179 | Method of manufacturing semiconductor device | Naofumi Ohashi, Kazuyuki Toyoda, Toshiyuki Kikuchi | 2018-06-05 |
| 9978587 | Method of manufacturing semiconductor device including forming a film containing a first element, a second element and carbon, substrate processing apparatus, and recording medium | Yoshiro Hirose, Ryuji Yamamoto | 2018-05-22 |
| 9929005 | Method of manufacturing semiconductor device | Teruo Yoshino, Tadashi Terasaki, Masanori NAKAYAMA | 2018-03-27 |
| 9899211 | Method of manufacturing semiconductor device, substrate processing apparatus and non-transitory computer-readable recording medium | Kaori Kirikihira, Yugo Orihashi | 2018-02-20 |
| 9890458 | Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Ryuji Yamamoto, Yoshiro Hirose | 2018-02-13 |
| 9865458 | Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Ryuji Yamamoto, Yoshiro Hirose | 2018-01-09 |