Issued Patents 2018
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10090322 | Method of manufacturing semiconductor device | Satoshi Shimamoto, Toshiyuki Kikuchi, Atsushi Moriya, Takashi Nakagawa | 2018-10-02 |
| 9978653 | Method of manufacturing semiconductor device | Tadashi Terasaki | 2018-05-22 |
| 9966238 | Method for manufacturing semiconductor device, substrate processing apparatus and non-transitory computer-readable recording medium | — | 2018-05-08 |
| 9929005 | Method of manufacturing semiconductor device | Satoshi Shimamoto, Teruo Yoshino, Tadashi Terasaki | 2018-03-27 |