Issued Patents 2018
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10128128 | Method of manufacturing semiconductor device having air gap between wirings for low dielectric constant | Tsuyoshi Takeda, Naofumi Ohashi, Toshiyuki Kikuchi | 2018-11-13 |
| 10115583 | Method of manufacturing semiconductor device | Satoshi Shimamoto, Kazuyuki Toyoda, Naofumi Ohashi | 2018-10-30 |
| 9916976 | Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Takuro USHIDA, Tsukasa Kamakura, Kimihiko NAKATANI | 2018-03-13 |