Issued Patents 2018
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10121650 | Method of manufacturing semiconductor device | — | 2018-11-06 |
| 9953830 | Method of manufacturing semiconductor device, substrate processing apparatus and recording medium | Takuro USHIDA, Yoshiro Hirose, Kimihiko NAKATANI | 2018-04-24 |
| 9916976 | Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Takuro USHIDA, Hiroshi Ashihara, Kimihiko NAKATANI | 2018-03-13 |