Issued Patents 2018
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9953830 | Method of manufacturing semiconductor device, substrate processing apparatus and recording medium | Tsukasa Kamakura, Yoshiro Hirose, Kimihiko NAKATANI | 2018-04-24 |
| 9916976 | Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Tsukasa Kamakura, Hiroshi Ashihara, Kimihiko NAKATANI | 2018-03-13 |