Issued Patents 2018
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10134584 | Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Atsushi Moriya | 2018-11-20 |
| 10090152 | Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Atsushi Moriya | 2018-10-02 |
| 9997354 | Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Kazuhiro Yuasa, Atsushi Moriya, Naoharu Nakaiso | 2018-06-12 |
| 9941119 | Method of forming silicon layer in manufacturing semiconductor device and recording medium | Atsushi Moriya, Naoharu Nakaiso, Kotaro Murakami | 2018-04-10 |
| 9899211 | Method of manufacturing semiconductor device, substrate processing apparatus and non-transitory computer-readable recording medium | Kaori Kirikihira, Satoshi Shimamoto | 2018-02-20 |