Issued Patents 2018
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9997354 | Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Yugo Orihashi, Atsushi Moriya, Naoharu Nakaiso | 2018-06-12 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9997354 | Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Yugo Orihashi, Atsushi Moriya, Naoharu Nakaiso | 2018-06-12 |