Issued Patents 2018
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9997354 | Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Yugo Orihashi, Kazuhiro Yuasa, Atsushi Moriya | 2018-06-12 |
| 9941119 | Method of forming silicon layer in manufacturing semiconductor device and recording medium | Atsushi Moriya, Yugo Orihashi, Kotaro Murakami | 2018-04-10 |