Issued Patents 2018
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10134586 | Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Satoshi Shimamoto, Yoshiro Hirose | 2018-11-20 |
| 10032629 | Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Satoshi Shimamoto, Yoshiro Hirose | 2018-07-24 |