Issued Patents 2018
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10156012 | Cleaning method, method of manufacturing semiconductor device, substrate processing apparatus, and a non-transitory computer-readable recording medium | Kenji Kameda, Masaya NAGATO, Yuta Takeda, Kunihiro Yamauchi | 2018-12-18 |
| 10153153 | Method for removing adhering matter and dry etching method | Masanori Watari, Kenji Kameda, Shin Hiyama, Yasutoshi TSUBOTA | 2018-12-11 |