Issued Patents 2018
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10156012 | Cleaning method, method of manufacturing semiconductor device, substrate processing apparatus, and a non-transitory computer-readable recording medium | Kenji Kameda, Masaya NAGATO, Akiou Kikuchi, Kunihiro Yamauchi | 2018-12-18 |