Issued Patents 2018
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10156012 | Cleaning method, method of manufacturing semiconductor device, substrate processing apparatus, and a non-transitory computer-readable recording medium | Kenji Kameda, Masaya NAGATO, Akiou Kikuchi, Yuta Takeda | 2018-12-18 |
| 9991138 | Etching method and etching apparatus | Jun LIN, Koji Takeya, Mitsuhiro Tachibana, Akifumi Yao, Tatsuo Miyazaki | 2018-06-05 |