Issued Patents 2018
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9991138 | Etching method and etching apparatus | Jun LIN, Koji Takeya, Mitsuhiro Tachibana, Kunihiro Yamauchi, Tatsuo Miyazaki | 2018-06-05 |
| 9929021 | Dry etching method and dry etching agent | Hiroyuki Oomori | 2018-03-27 |