Issued Patents 2018
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9991138 | Etching method and etching apparatus | Koji Takeya, Mitsuhiro Tachibana, Akifumi Yao, Kunihiro Yamauchi, Tatsuo Miyazaki | 2018-06-05 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9991138 | Etching method and etching apparatus | Koji Takeya, Mitsuhiro Tachibana, Akifumi Yao, Kunihiro Yamauchi, Tatsuo Miyazaki | 2018-06-05 |