Issued Patents 2018
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10153153 | Method for removing adhering matter and dry etching method | Akiou Kikuchi, Masanori Watari, Kenji Kameda, Shin Hiyama | 2018-12-11 |
| 9974191 | Method of manufacturing semiconductor device, substrate processing apparatus and recording medium | — | 2018-05-15 |