Issued Patents 2018
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10121651 | Method of manufacturing semiconductor device | Shin Hiyama | 2018-11-06 |
| 10014226 | Method of manufacturing semiconductor device | — | 2018-07-03 |
| 9970107 | Method of manufacturing semiconductor device | Atsuro SEINO | 2018-05-15 |
| 9972500 | Method of manufacturing semiconductor device | Yukinao KAGA, Atsuro SEINO, Atsuhiko Ashitani, Ryohei Maeno, Masanori Sakai | 2018-05-15 |
| 9966268 | Method of manufacturing semiconductor device and substrate processing apparatus | Atsuro SEINO | 2018-05-08 |