Issued Patents 2018
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9970107 | Method of manufacturing semiconductor device | Arito OGAWA | 2018-05-15 |
| 9972500 | Method of manufacturing semiconductor device | Yukinao KAGA, Arito OGAWA, Atsuhiko Ashitani, Ryohei Maeno, Masanori Sakai | 2018-05-15 |
| 9966268 | Method of manufacturing semiconductor device and substrate processing apparatus | Arito OGAWA | 2018-05-08 |