Issued Patents 2018
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9895727 | Method of manufacturing semiconductor device, method of cleaning interior of process chamber, substrate processing apparatus, and recording medium | Yoshinobu Nakamura, Masayoshi Minami, Masayuki Asai, Kazuyuki Okuda | 2018-02-20 |
| 9881789 | Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Yoshitomo HASHIMOTO, Yoshiro Hirose, Shingo NOHARA, Ryota Sasajima, Katsuyoshi Harada | 2018-01-30 |
| 9856560 | Method for manufacturing semiconductor device and substrate processing apparatus | Kenji Kameda, Jie Wang | 2018-01-02 |