Issued Patents 2018
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10163625 | Method for manufacturing semiconductor device, substrate-processing apparatus, and recording medium | Yoshinobu Nakamura, Kiyohiko Maeda, Yoshiro Hirose, Ryota Horiike | 2018-12-25 |
| 10096463 | Method of manufacturing semiconductor device, substrate processing apparatus comprising exhaust port and multiple nozzles, and recording medium | Tatsuru Matsuoka, Masaya NAGATO, Ryota Horiike, Shintaro Kogura | 2018-10-09 |
| 10090149 | Method of manufacturing semiconductor device by forming and modifying film on substrate | Yoshiro Hirose | 2018-10-02 |
| 10074535 | Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Tatsuru Matsuoka, Yoshiro Hirose | 2018-09-11 |
| 9934962 | Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Yoshiro Hirose, Tatsuru Matsuoka | 2018-04-03 |
| 9881789 | Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Yoshiro Hirose, Shingo NOHARA, Ryota Sasajima, Katsuyoshi Harada, Yuji Urano | 2018-01-30 |