Issued Patents 2018
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10096463 | Method of manufacturing semiconductor device, substrate processing apparatus comprising exhaust port and multiple nozzles, and recording medium | Yoshitomo HASHIMOTO, Masaya NAGATO, Ryota Horiike, Shintaro Kogura | 2018-10-09 |
| 10074535 | Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Yoshiro Hirose, Yoshitomo HASHIMOTO | 2018-09-11 |
| 9934962 | Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Yoshitomo HASHIMOTO, Yoshiro Hirose | 2018-04-03 |