Issued Patents 2018
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10096463 | Method of manufacturing semiconductor device, substrate processing apparatus comprising exhaust port and multiple nozzles, and recording medium | Yoshitomo HASHIMOTO, Tatsuru Matsuoka, Masaya NAGATO, Ryota Horiike | 2018-10-09 |
| 10081868 | Gas supply nozzle, substrate processing apparatus, and non-transitory computer-readable recording medium | Kosuke Takagi, Ryota Sasajima, Naonori Akae, Risa YAMAKOSHI, Toshiki Fujino +2 more | 2018-09-25 |
| 10066294 | Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Ryota Sasajima, Masayoshi Minami | 2018-09-04 |
| 10036092 | Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Ryota Sasajima | 2018-07-31 |