Issued Patents 2018
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10081868 | Gas supply nozzle, substrate processing apparatus, and non-transitory computer-readable recording medium | Kosuke Takagi, Ryota Sasajima, Shintaro Kogura, Naonori Akae, Toshiki Fujino +2 more | 2018-09-25 |
| 9934960 | Method of manufacturing semiconductor device | Hideki Horita, Masato Terasaki | 2018-04-03 |
| 9905413 | Method of manufacturing semiconductor device | Takashi Ozaki, Masato Terasaki, Naonori Akae, Hideki Horita | 2018-02-27 |