Issued Patents 2018
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10081868 | Gas supply nozzle, substrate processing apparatus, and non-transitory computer-readable recording medium | Kosuke Takagi, Ryota Sasajima, Shintaro Kogura, Risa YAMAKOSHI, Toshiki Fujino +2 more | 2018-09-25 |
| 9966251 | Method of manufacturing semiconductor device and substrate processing apparatus | Ryota Sasajima, Yoshiro Hirose, Yosuke Ota, Kojiro Yokozawa | 2018-05-08 |
| 9966252 | Method of manufacturing semiconductor device and substrate processing apparatus | Ryota Sasajima, Yoshiro Hirose, Yosuke Ota, Kojiro Yokozawa | 2018-05-08 |
| 9905413 | Method of manufacturing semiconductor device | Risa YAMAKOSHI, Takashi Ozaki, Masato Terasaki, Hideki Horita | 2018-02-27 |