Issued Patents 2018
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9966251 | Method of manufacturing semiconductor device and substrate processing apparatus | Ryota Sasajima, Yoshiro Hirose, Yosuke Ota, Naonori Akae | 2018-05-08 |
| 9966252 | Method of manufacturing semiconductor device and substrate processing apparatus | Ryota Sasajima, Yoshiro Hirose, Yosuke Ota, Naonori Akae | 2018-05-08 |