Issued Patents 2018
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10081868 | Gas supply nozzle, substrate processing apparatus, and non-transitory computer-readable recording medium | Kosuke Takagi, Shintaro Kogura, Naonori Akae, Risa YAMAKOSHI, Toshiki Fujino +2 more | 2018-09-25 |
| 10066294 | Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Shintaro Kogura, Masayoshi Minami | 2018-09-04 |
| 10036092 | Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Shintaro Kogura | 2018-07-31 |
| 9966251 | Method of manufacturing semiconductor device and substrate processing apparatus | Yoshiro Hirose, Yosuke Ota, Naonori Akae, Kojiro Yokozawa | 2018-05-08 |
| 9966252 | Method of manufacturing semiconductor device and substrate processing apparatus | Yoshiro Hirose, Yosuke Ota, Naonori Akae, Kojiro Yokozawa | 2018-05-08 |
| 9881789 | Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Yoshitomo HASHIMOTO, Yoshiro Hirose, Shingo NOHARA, Katsuyoshi Harada, Yuji Urano | 2018-01-30 |