Issued Patents 2018
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10081868 | Gas supply nozzle, substrate processing apparatus, and non-transitory computer-readable recording medium | Kosuke Takagi, Ryota Sasajima, Shintaro Kogura, Naonori Akae, Risa YAMAKOSHI +2 more | 2018-09-25 |
| 10066294 | Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Ryota Sasajima, Shintaro Kogura | 2018-09-04 |
| 9983074 | Force detector | Tsutomu Sawai | 2018-05-29 |
| 9895727 | Method of manufacturing semiconductor device, method of cleaning interior of process chamber, substrate processing apparatus, and recording medium | Yoshinobu Nakamura, Masayuki Asai, Kazuyuki Okuda, Yuji Urano | 2018-02-20 |