Issued Patents 2018
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9963785 | Substrate processing apparatus and semiconductor device manufacturing method | Koichi Honda, Mamoru Umemoto, Kazuyuki Okuda | 2018-05-08 |
| 9895727 | Method of manufacturing semiconductor device, method of cleaning interior of process chamber, substrate processing apparatus, and recording medium | Yoshinobu Nakamura, Masayoshi Minami, Kazuyuki Okuda, Yuji Urano | 2018-02-20 |