Issued Patents 2018
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10163625 | Method for manufacturing semiconductor device, substrate-processing apparatus, and recording medium | Yoshinobu Nakamura, Kiyohiko Maeda, Yoshiro Hirose, Yoshitomo HASHIMOTO | 2018-12-25 |
| 10096463 | Method of manufacturing semiconductor device, substrate processing apparatus comprising exhaust port and multiple nozzles, and recording medium | Yoshitomo HASHIMOTO, Tatsuru Matsuoka, Masaya NAGATO, Shintaro Kogura | 2018-10-09 |