Issued Patents 2018
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10163625 | Method for manufacturing semiconductor device, substrate-processing apparatus, and recording medium | Yoshinobu Nakamura, Yoshiro Hirose, Ryota Horiike, Yoshitomo HASHIMOTO | 2018-12-25 |