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Extended dark space shield |
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Zhendong Liu, Rongjun Wang, Xianmin Tang, Srinivas Gandikota, Tza-Jing Gung |
2018-08-28 |
| 9957601 |
Apparatus for gas injection in a physical vapor deposition chamber |
Kirankumar Neelasandra SAVANDAIAH, Alan A. Ritchie, Isaac Porras, Keith A. Miller |
2018-05-01 |
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2018-05-01 |
| 9914632 |
Methods and apparatus for liquid chemical delivery |
Ilker Durukan, Paul F. Ma |
2018-03-13 |
| 9914999 |
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2018-03-13 |
