Issued Patents 2018
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10147620 | Bolted wafer chuck thermal management systems and methods for wafer processing systems | Dmitry Lubomirsky, Ananda Seelavanth Math, Saravanakumar Natarajan, Shubham Chourey | 2018-12-04 |
| 9896770 | Methods of etching films with reduced surface roughness | Benjamin Schmiege, Nitin K. Ingle, Srinivas D. Nemani, Jeffrey W. Anthis, Xikun Wang +1 more | 2018-02-20 |